Generation of multicomponent ion beams by a vacuum arc ion source with compound cathode
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3257703
Reference10 articles.
1. Vacuum arc ion sources: recent developments and applications
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4. Multiple‐species ion beams from titanium‐hafnium alloy cathodes in vacuum arc plasmas
5. Anisotropic defect distribution in ZnSe/ZnS epitaxial layers grown by metalorganic vapor‐phase epitaxy on (001)‐oriented GaAs
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