TAMEK—Sources and techniques for high‐dose implantation, ion beam mixing, and ion‐beam assisted deposition of metal ions
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Published:1994-04
Issue:4
Volume:65
Page:1322-1324
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ISSN:0034-6748
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Container-title:Review of Scientific Instruments
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language:en
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Short-container-title:Review of Scientific Instruments
Cited by
4 articles.
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