On the E to H mode transition in a dual frequency (2 and 13.56 MHz) inductively coupled plasma
Author:
Affiliation:
1. Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, South Korea
Funder
National Research Foundation of Korea
Ministry of Trade, Industry and Energy
Korea Electric Power Corporation
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5133437
Reference31 articles.
1. LXVI.On the origin of the electrodeless discharge
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4. Review of inductively coupled plasmas for plasma processing
5. On the E - H mode transition in RF inductive discharges
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