Fractional repetitive control of nanopositioning stages for tracking high-frequency periodic inputs with nonsynchronized sampling
Author:
Affiliation:
1. State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
2. Shanghai Key Lab of Advanced Manufacturing Environment, Shanghai, China
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5088673
Reference33 articles.
1. Scanning probe nanoimprint lithography
2. Imaging modes of atomic force microscopy for application in molecular and cell biology
3. Invited Review Article: High-speed flexure-guided nanopositioning: Mechanical design and control issues
4. Improvement in the Imaging Performance of Atomic Force Microscopy: A Survey
5. Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey
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1. Data-driven based cross-coupling compensation method for the piezoelectric tube scanner of atomic force microscopes;Measurement;2023-09
2. Robust composite repetitive control with disturbance observer for high-precision tracking of piezo-actuated nano-stages with measurement delays;Review of Scientific Instruments;2023-06-01
3. Fractional delay filter based repetitive control for precision tracking: Design and application to a piezoelectric nanopositioning stage;Mechanical Systems and Signal Processing;2022-02
4. Dual-Notch-Based Repetitive Control for Tracking Lissajous Scan Trajectories With Piezo-Actuated Nanoscanners;IEEE Transactions on Instrumentation and Measurement;2022
5. Enhanced Odd-Harmonic Repetitive Control of Nanopositioning Stages Using Spectrum-Selection Filtering Scheme for High-Speed Raster Scanning;IEEE Transactions on Automation Science and Engineering;2021-07
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