Fabrication and electromechanical properties of a self-actuating Pb(Zr0.52Ti0.48)O3 microcantilever using a direct patternable sol-gel method
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2168261
Reference12 articles.
1. Microelectromechanical systems based on ferroelectric thin films
2. Dry-Etching Mechanism of SputteredPb(Zr1-xTix)O3Film
3. Release of multi-layer metal structure in MEMS devices by dry etching technique
4. Etching in Microsystem Technology
5. Optically Defined Multifunctional Patterning of Photosensitive Thin-Film Silica Mesophases
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2. 4.0-nm-thick amorphous Nb–Ni film as a conducting diffusion barrier layer for integrating ferroelectric capacitor on Si;Journal of Alloys and Compounds;2015-10
3. Directly patternable high refractive index ferroelectric sol–gel resist;Materials Chemistry and Physics;2015-08
4. Reliability of Ferroelectric Multilayer PZT Thick Films Fabricated by Aerosol Deposition;Ferroelectrics;2014-10-03
5. A patterning technique of lead zirconate titanate thin film by ultraviolet-light;Microsystem Technologies;2013-03-08
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