1. Surface Micromachining for Microsensors and Microactuators;Howe;J. Fac. Sci. Technol.,1988
2. Interested readers will find eight (every two years) Proceedings of the International Conference on Solid-State Sensors and Actuators,1995
3. seven Proceedings of the IEEE Workshop on Micro Electro Mechanical Systems, most recently held in Amersterdam, The Netherlands,1995
4. Surface-Micromachined Accelerometers;Payne,1995
5. Cooperative Development of Piezoresistive Pressure Sensor with Integral Signal Conditioning for Automotive and Industrial Applications;Ansermet;Sensors and Actuators,1990