Composition control and ferroelectric properties of sidewalls in integrated three-dimensional SrBi2Ta2O9-based ferroelectric capacitors

Author:

Goux L.,Lisoni J. G.,Schwitters M.,Paraschiv V.,Maes D.,Haspeslagh L.,Wouters D. J.,Menou N.,Turquat Ch.,Madigou V.,Muller Ch.,Zambrano R.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

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5. Precursor mutual interactions in the kinetics of MOCVD of SBT films

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