Imaging the strain fields resulting from laser micromachining of semiconductors
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1591241
Reference17 articles.
1. Laser ablation and micromachining with ultrashort laser pulses
2. Femtosecond, picosecond and nanosecond laser ablation of solids
3. Femtosecond laser machining of gallium nitride
4. Micro- and Sub-Micromachining of Type IIa Single Crystal Diamond Using a Ti:Sapphire Femtosecond Laser
5. Femtosecond ablation of ultrahard materials
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