SEM, AFM and TEM Studies for Repeated Irradiation Effect of Femtosecond Laser on 4H-SiC Surface Morphology at Near Threshold Fluence-Reference-Cited by-同舟云学术

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SEM, AFM and TEM Studies for Repeated Irradiation Effect of Femtosecond Laser on 4H-SiC Surface Morphology at Near Threshold Fluence

Published:2018 Issue:2 Volume:7 Page:P29-P34
ISSN:2162-8769
Container-title:ECS Journal of Solid State Science and Technology
language:en
Short-container-title:ECS J. Solid State Sci. Technol.

Author:

Wang Chengwu,Kurokawa Syuhei,Doi Toshiro,Yuan Julong,Fan Li,Mitsuhara Masatoshi,Lu Huizong,Yao Weifeng,Zhang Yu,Zhang Kehua

Publisher

The Electrochemical Society

Subject

Electronic, Optical and Magnetic Materials

Reference38 articles.

1. Fabrication of uniform nanogrooves on 6H-SiC by femtosecond laser ablation

2. Coulomb explosion-induced formation of highly oriented nanoparticles on thin films of 3C–SiC by the femtosecond pulsed laser

3. Enhancement of optical absorption and photocurrent of 6H-SiC by laser surface nanostructuring

4. Formation mechanisms of uniform arrays of periodic nanoparticles and nanoripples on 6H-SiC crystal surface induced by femtosecond laser ablation

5. Growth of high spatial frequency periodic ripple structures on SiC crystal surfaces irradiated with successive femtosecond laser pulses

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Analysis of the microscopic characteristics of periodic structure arrays on silicon carbide fabricated by femtosecond laser;Ceramics International;2024-01

2. High-quality structures on 4H-SiC fabricated by femtosecond laser LIPSS and chemical etching;Optics & Laser Technology;2023-08

3. Investigation on the Processing Quality of Nanosecond Laser Stealth Dicing for 4H-SiC Wafer;ECS Journal of Solid State Science and Technology;2023-03-01

4. Experimental Investigation on Ablation of 4H-SiC by Infrared Femtosecond Laser;Micromachines;2022-08-11

5. Effect of Mn-Based Slurries on Chemical Mechanical Polishing of SiC Substrates;ECS Journal of Solid State Science and Technology;2022-07-01

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