Texture analysis of polycrystalline silicon films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.345196
Reference5 articles.
1. Surface micromachining for microsensors and microactuators
2. Diffusion of Impurities in Polycrystalline Silicon
3. Determination of Preferred Orientation in Flat Transmission Samples Using a Geiger Counter X‐Ray Spectrometer
4. The Effect of Low Pressure on the Structure of LPCVD Polycrystalline Silicon Films
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1. Role of Preferential Crystallographic Orientation in Piezoresistance Anisotropy for Cubic Polycrystalline Aggregates;Sensors and Materials;2018-09-28
2. Description of Piezoresistance in Polycrystalline Aggregates by Crystallites Orientation Distribution Function;IEEJ Transactions on Sensors and Micromachines;2018-05-01
3. Texture Analysis by Advanced Diffraction Methods;Modern Diffraction Methods;2013-01-14
4. Estimating the In-Plane Young's Modulus of Polycrystalline Films in MEMS;Journal of Microelectromechanical Systems;2012-08
5. Modelling of diffraction from fibre texture gradients in thin polycrystalline films;Journal of Applied Crystallography;2007-07-13
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