Estimating the In-Plane Young's Modulus of Polycrystalline Films in MEMS-Reference-Cited by-同舟云学术

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Estimating the In-Plane Young's Modulus of Polycrystalline Films in MEMS

Published:2012-08 Issue:4 Volume:21 Page:840-849
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Cantwell Patrick R.,Kim Hojin,Schneider Matthew M.,Hsu Hao-Han,Peroulis Dimitrios,Stach Eric A.,Strachan Alejandro

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/6252030/06182688.pdf?arnumber=6182688

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