Probing electrical properties of a silicon nanocrystal thin film using x-ray photoelectron spectroscopy

Author:

Laudari Amrit1,Pathiranage Sameera1,Thomas Salim A.2,Petersen Reed J.3,Anderson Kenneth J.2,Pringle Todd A.2,Hobbie Erik K.2,Oncel Nuri1ORCID

Affiliation:

1. Department of Physics and Astrophysics, University of North Dakota, Grand Forks, North Dakota 58202, USA

2. Materials and Nanotechnology Program, North Dakota State University, Fargo, North Dakota 58108, USA

3. Department of Physics, North Dakota State University, Fargo, North Dakota 58108, USA

Abstract

We performed x-ray photoelectron spectroscopy measurements on a thin film of Si nanocrystals (SiNCs) while applying DC or AC external biases to extract the resistance and the capacitance of the thin film. The measurement consists of the application of 10 V DC or square wave pulses of 10 V amplitude to the sample at various frequencies ranging from 0.01 to 1 MHz while recording x-ray photoemission data. To analyze the data, we propose three different models with varying degrees of accuracy. The calculated capacitance of SiNCs agrees with the experimental value in the literature.

Publisher

AIP Publishing

Subject

Instrumentation

Reference28 articles.

1. J. E. Castle, in Practical Surface Analysis by Auger and X-Ray Photoelectron Spectroscopy, edited by D. Briggs and M. P. Seah (John Wiley & Sons, Chichester, 1983), p. 533.

2. SiO2 film thickness metrology by x-ray photoelectron spectroscopy

3. Charging effects in gold nanoclusters grown on octanedithiol layers

4. A silicon nanocrystals based memory

5. Time-Resolved XPS Analysis of the SiO2/Si System in the Millisecond Range

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