Understanding the role of buried interface charges in a metal-oxide-semiconductor stack of Ti/Al2O3/Si using hard x-ray photoelectron spectroscopy
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4919448
Reference27 articles.
1. Hard x-ray photoelectron spectroscopy of oxide hybrid and heterostructures: a new method for the study of buried interfaces
2. Observation of band bending of metal/high-k Si capacitor with high energy x-ray photoemission spectroscopy and its application to interface dipole measurement
3. Simultaneous Nitrogen Doping and Reduction of Graphene Oxide
4. Simultaneous doping of Zn and Sb in SnO2 ceramics: Enhancement of electrical conductivity
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Using hard X-ray photoelectron spectroscopy to study a SiO2/HfO2-based interface dipole modulation stack embedded in a metal–insulator-metal structure;Applied Physics Express;2022-11-01
2. Effects of carbon impurity in ALD-Al2O3 film on HAXPES spectrum and electrical properties of Al2O3/AlGaN/GaN MIS structure;Japanese Journal of Applied Physics;2022-05-24
3. Lifetime effects and satellites in the photoelectron spectrum of tungsten metal;Physical Review B;2022-01-21
4. InAs FinFETs Performance Enhancement by Superacid Surface Treatment;IEEE Transactions on Electron Devices;2019-04
5. Hard X-ray photoelectron spectroscopy investigation of annealing effects on buried oxide in GaAs/Si junctions by surface-activated bonding;Applied Surface Science;2019-04
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3