Electronic defect levels in self‐implanted cw laser‐annealed silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.90612
Reference11 articles.
1. Physical and electrical properties of laser‐annealed ion‐implanted silicon
2. cw argon laser annealing of ion‐implanted silicon
3. Solid‐phase epitaxy of implanted silicon by cw Ar ion laser irradiation
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