Laser-induced amorphization of silicon during pulsed-laser irradiation of TiN/Ti/polycrystalline silicon/SiO2/silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1521579
Reference8 articles.
1. Solidification of highly undercooled liquid silicon produced by pulsed laser melting of ion-implanted amorphous silicon: Time-resolved and microstructural studies
2. Modeling of nonequilibrium melting and solidification in laser-irradiated materials
3. Annealing of ultrashallow p+/n junction by 248 nm excimer laser and rapid thermal processing with different preamorphization depths
4. Picosecond laser‐induced melting and resolidification morphology on Si
5. Silicon Melt, Regrowth, and Amorphization Velocities During Pulsed Laser Irradiation
Cited by 16 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Pulsed Laser Annealing Technology for Nano-Scale Fabrication of Silicon-Based Devices in Semiconductors ☆;Advances in Laser Materials Processing;2018
2. Processing of Back Surface of Si Wafers With a Pulsed Nd:YAG Laser;Journal of Laser Micro/Nanoengineering;2016-07
3. Modulated magnetic property, enhanced microwave absorption and Mössbauer spectroscopy of Ni0.40Zn0.40Cu0.20Fe2O4 nanoparticles embedded in carbon nanotubes;Journal of Alloys and Compounds;2013-11
4. Dynamical resolidification behavior of silicon thin films during frontside and backside excimer laser annealing;Optics and Lasers in Engineering;2011-07
5. Pulsed laser annealing technology for nanoscale fabrication of silicon-based devices in semiconductors;Advances in Laser Materials Processing;2010
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3