Characterization of SiO2/Si heterostructures by soft x‐ray reflection
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.347260
Reference73 articles.
1. The role of interfaces in ultrasmall semiconductor devices
2. Interface roughness scattering in GaAs/AlAs quantum wells
3. Experimental comparison of atomic roughness and Hall mobility inp‐Si inversion layers
4. Morphology and electronic structure of Si–SiO2 interfaces and Si surfaces
5. Dependence of interface state density on the atomic roughness at the Si — SiO2 interface
Cited by 11 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Study of growth kinetics and depth resolved composition of a-SiNx:H thin films by resonant soft X-ray reflectivity at the Si L2,3-edge;Applied Surface Science;2014-06
2. Growth kinetics and compositional analysis of silicon rich a-SiNx:H film: A soft x-ray reflectivity study;Applied Physics Letters;2010-10-11
3. Temperature dependence of SiO2/Si interfacial structure formed by radio-frequency magnetron sputter deposited SiO2 thin films on Si(111);Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1999-03
4. Structural characterization of radiofrequency magnetron sputter deposited SiO2thin films;Journal of Physics D: Applied Physics;1999-01-01
5. Thin film and surface characterization by specular X-ray reflectivity;Critical Reviews in Solid State and Materials Sciences;1997-03
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3