Transmission electron microscopy study of hydrogen defect formation at extended defects in hydrogen plasma treated multicrystalline silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3073893
Reference28 articles.
1. Effects of hydrogen plasma on passivation and generation of defects in multicrystalline silicon
2. Hydrogen in crystalline semiconductors
3. On the permeation of hydrogen and helium in single crystal silicon and germanium at elevated temperatures
4. Influence of hydrogen passivation on majority and minority charge carrier mobilities in ribbon silicon
5. Investigation of Hydrogen Plasma Etched Si Surfaces
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