Gettering of iron by oxygen precipitates
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.120592
Reference5 articles.
1. Mechanism of internal gettering of interstitial impurities in Czochralski-grown silicon
2. Theory of diffusion-limited precipitation
3. Dependence on Morphology of Oxygen Precipitates upon Oxygen Supersaturation in Czochralski Silicon Crystals
4. A study of gettering efficiency and stability in Czochralski silicon
5. Transition metals in silicon
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3. Participation of nitrogen impurities in the growth of grown-in oxide precipitates in nitrogen-doped Czochralski silicon;Journal of Applied Physics;2022-04-21
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