1. Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams, Ministry of Education, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116023, China
2. Xi'an Aerospace Propulsion Institute, China Aerospace Science and Technology Corporation, Xi'an 710100, China
3. School of Physics and Electronic Technology, Liaoning Normal University, Dalian 116029, China