Microfabricated suspensions for electrical connections on the tunable elastomer membrane
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1835553
Reference13 articles.
1. From Micro- to Nanofabrication with Soft Materials
2. Poly(dimethylsiloxane) as a Material for Fabricating Microfluidic Devices
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4. Tunable liquid-filled microlens array integrated with microfluidic network
5. Spontaneous formation of ordered structures in thin films of metals supported on an elastomeric polymer
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