Optimal design and experiment of a three-axis out-of-plane nano positioning stage using a new compact bridge-type displacement amplifier
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4827087
Reference14 articles.
1. Flexure hinges for piezoactuator displacement amplifiers: flexibility, accuracy, and stress considerations
2. Investigation of a 3-DOF micro-positioning table for surface grinding
3. Design of a precision compliant parallel positioner driven by dual piezoelectric actuators
4. Design, implementation, and control of a six-axis compliant stage
Cited by 60 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Development of a Driving and Control System of Large Stroke 3-D Air-Floating Motion Stage With Submicrometer-Scale Positioning Accuracy;IEEE Sensors Journal;2024-02-01
2. An electromechanical dynamic stiffness matrix of piezoelectric stacks for systematic design of micro/nano motion actuators;Smart Materials and Structures;2023-10-05
3. Modeling and Analysis of a Conical Bridge-Type Displacement Amplification Mechanism Using the Non-Uniform Rational B-Spline Curve;Materials;2023-09-11
4. Development of submicron precision three-dimensional low cross-interference air-floating motion stage;Review of Scientific Instruments;2023-06-01
5. Kinematic Modeling of a Novel 3-PSS/S Flexible Parallel Micro-turntable: Accuracy Comparison Between Pseudo-Rigid-Body Model-Based and Compliance Matrix Method-Based Models;Iranian Journal of Science and Technology, Transactions of Mechanical Engineering;2023-02-18
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3