Optimal design and experiment of a three-axis out-of-plane nano positioning stage using a new compact bridge-type displacement amplifier
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4827087
Reference14 articles.
1. Flexure hinges for piezoactuator displacement amplifiers: flexibility, accuracy, and stress considerations
2. Investigation of a 3-DOF micro-positioning table for surface grinding
3. Design of a precision compliant parallel positioner driven by dual piezoelectric actuators
4. Design, implementation, and control of a six-axis compliant stage
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