La–silicate gate dielectrics fabricated by solid phase reaction between La metal and SiO2 underlayers
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1622107
Reference6 articles.
1. High-κ gate dielectrics: Current status and materials properties considerations
2. Stable zirconium silicate gate dielectrics deposited directly on silicon
3. The role of the OH species in high-k/polycrystalline silicon gate electrode interface reactions
4. Formation of a stratified lanthanum silicate dielectric by reaction with Si(001)
5. Ultrathin zirconium silicate gate dielectrics with compositional gradation formed by self-organized reactions
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