Solubility of nitrogen and phosphorus in 4H-SiC: A theoretical study
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1769075
Reference16 articles.
1. Study of Nitrogen Incorporation in 6H-SiC Single Crystals Grown by PVT
2. Study of Nitrogen Incorporation in 6H-SiC Single Crystals Grown by PVT
3. Growth of Phosphorus-Doped 6H-SiC Single Crystals by the Modified Lely Method
4. The effects of N+ dose in implantation into 6h-sic epilayers
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