Special modulator for high frequency, low-voltage plasma immersion ion implantation
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1149675
Reference23 articles.
1. Plasma source ion‐implantation technique for surface modification of materials
2. Plasma-Immersion Ion Implantation
3. Modification of mechanical and chemical surface properties of metals by plasma immersion ion implantation
4. Dose and energy uniformity over inner surface in plasma immersion ion implantation
5. Inner surface ion implantation using deflecting electric field
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