Accurate microfour-point probe sheet resistance measurements on small samples
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3125050
Reference24 articles.
1. Scanning microscopic four-point conductivity probes
2. Accurate Sheet Resistance Measurement on Ultra-Shallow Profiles
3. Micro-Scale Sheet Resistance Measurements on Ultra Shallow Junctions
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