The influence of “starving plasma” regime on carbon content and bonds in a-Si1−xCx:H thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.368436
Reference23 articles.
1. Electrical and optical properties of amorphous silicon carbide, silicon nitride and germanium carbide prepared by the glow discharge technique
2. Photoluminescence and optical properties of plasma-deposited amorphous Si x C1–x alloys
3. Physics of Amorphous Silicon–Carbon Alloys
4. Optical constants of a series of amorphous hydrogenated silicon-carbon alloy films: Dependence of optical response on film microstructure and evidence for homogeneous chemical ordering
5. Small-angle X-ray scattering studies of a-Si:C:H
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