Fast growth of ultrananocrystalline diamond films by bias-enhanced nucleation and growth process in CH4/Ar plasma
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4875808
Reference26 articles.
1. Studies on nucleation process in diamond CVD: an overview of recent developments
2. Growth of Diamond Seed Crystals by Vapor Deposition
3. Microstructure of ultrananocrystalline diamond films grown by microwave Ar–CH4 plasma chemical vapor deposition with or without added H2
4. Synthesis and electron field emission of nanocrystalline diamond thin films grown from N2/CH4 microwave plasmas
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