Evolution of nanocrystalline diamond thin films by high-density low-pressure CH4 plasma in planar inductively coupled plasma CVD
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Publisher
AIP Publishing
Link
http://aip.scitation.org/doi/pdf/10.1063/5.0016897
Reference10 articles.
1. D. Das, “Nanocrystalline Diamond: A High-Impact Carbon Nanomaterial for Multifunctional Applications Including as Nanofiller”, in Carbon-Based Nanofillers and their Rubber Nanocomposites, edited by Yaragalla, Mishra, Thomas, Kalarikkal and Maria (Elsevier, Amsterdam, The Netherlands, 2019), pp. 123–181.
2. Buckyball microwave plasmas: Fragmentation and diamond‐film growth
3. Crystalline diamond growth in thin films deposited from a CH4/Ar rf plasma
4. Fast growth of ultrananocrystalline diamond films by bias-enhanced nucleation and growth process in CH4/Ar plasma
5. Low temperature growth of carbon nanotubes by microwave plasma stimulated by CO2 as weak oxidant and guided by shadow masking
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1. Preparation of boron doped diamond-like carbon films in a low-pressure high-density plasma in RF ICP-CVD;Materials Today: Proceedings;2022
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