Macro- and microstress analysis in sol-gel derived Pb(ZrxTi1−x)O3 thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.370638
Reference22 articles.
1. High-permittivity lead-based perovskite dielectrics for DRAM applications
2. Sol-gel derived PZT force sensor for scanning force microscopy
3. Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions
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