Microstructural characterization of MgO thin films grown by radio-frequency sputtering. Target and substrate-temperature effect
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1558964
Reference34 articles.
1. A proposal of epitaxial oxide thin film structures for future oxide electronics
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4. Growth and microstructural study of radio frequency magnetron sputtered MgO films on silicon
5. Substrate Selection for Thin-Film Growth
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