The effect of phosphorus ion implantation on molybdenum/silicon contacts
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.329268
Reference16 articles.
1. Reaction kinetics of molybdenum thin films on silicon (111) surface
2. Silicidbildung in dünnen molybdän- und wolframschichten auf einkristallinen siliziumsubstraten bei relativ niedrigen temperaturen
3. Growth Kinetics Observed in the Formation of Metal Silicides on Silicon
4. Metallurgical boundary properties and electrophysical properties of molybdenum-silicon junctions
5. Reaction of Mo Thin Films on Si (100) Surfaces
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