Investigation of AFM-based machining of ferroelectric thin films at the nanoscale-Reference-Cited by-同舟云学术

Investigation of AFM-based machining of ferroelectric thin films at the nanoscale

Published:2020-01-21 Issue:3 Volume:127 Page:034103
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Zhang Fengyuan¹²^ORCID,Edwards David¹²^ORCID,Deng Xiong³,Wang Yadong³,Kilpatrick Jason I.¹²^ORCID,Bassiri-Gharb Nazanin⁴⁵^ORCID,Kumar Amit⁶^ORCID,Chen Deyang³^ORCID,Gao Xingsen³^ORCID,Rodriguez Brian J.¹²^ORCID

Affiliation:

1. School of Physics, University College Dublin, Belfield, Dublin D04 V1W8, Ireland

2. Conway Institute of Biomolecular and Biomedical Research, University College Dublin, Belfield, Dublin D04 V1W8, Ireland

3. Institute for Advanced Materials, South China Academy of Advanced Optoelectronics, Guangzhou 510006, People's Republic of China

4. School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0405, USA

5. George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0405, USA

6. Centre for Nanostructured Media, School of Mathematics and Physics, Queen's University Belfast, Belfast BT7 1NN, United Kingdom

Funder

US National Science Foundation

Science Foundation Ireland

National Natural Science Foundation of China

Sustainable Energy Authority of Ireland

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5133018

Reference74 articles.

1. Advances in top–down and bottom–up surface nanofabrication: Techniques, applications & future prospects

2. Nanofabrication by scanning probe microscope lithography: A review

3. Nanostructure patterns written in III–V semiconductors by an atomic force microscope

4. Recent advances in AFM tip-based nanomechanical machining

5. Controlled nanodot fabrication by rippling polycarbonate surface using an AFM diamond tip

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