Study of the AlPN/GaN high electron mobility transistors with improved transconductance linearity

Author:

Yao Yixin1ORCID,Zhang Yachao1,Zhu Jiaduo1,Dang Kui1ORCID,Su Chunxu1,Ma Jinbang1ORCID,Chen Kai1ORCID,Wang Baiqi1ORCID,Liu Wenjun1ORCID,Xu Shengrui1,Zhao Shenglei1ORCID,Zhang Jincheng1,Hao Yue1ORCID

Affiliation:

1. State Key Discipline Laboratory of Wide Band Gap Semiconductor Technology, School of Microelectronics, Xidian University , No. 2 South TaiBai Road, Xi'an 710071, China

Abstract

In this work, an improved method of metal-organic chemical vapor deposition was utilized to grow high-quality AlPN/GaN heterostructures. The characteristics of AlPN those are essential to achieving high linearity in the resulting devices were then investigated. High linearity AlPN/GaN high electron mobility transistors (HEMTs) with flatter transconductance curves were fabricated, in which the gate voltage swings are 1.85 and 4.35 V at 300 and 400 K when Gm drops 5% from Gm,max. Additionally, the impact of P anti-site defects and surface states on the high linearity of AlPN/GaN HEMTs at different temperatures was discussed. It was found that while both factors benefit linearity at room temperature, only the P anti-site defects have a positive effect on linearity at high temperatures. The results demonstrate the significant advantages of AlPN-based structures in high linearity device applications and provide instructive principles for improving linearity.

Funder

National key research and Development program of China

National Natural Science Foundation of China

Young Elite Scientists Sponsorship Program

Major Projects of Shanxi Province

Key Research and Development Program of Jiangsu Province

Shanxi Province key research and development program

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

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