Ultrasensitive quartz crystal microbalance enabled by micropillar structure
Author:
Funder
NSF
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4862258
Reference25 articles.
1. Miniaturized, highly sensitive single-chip multichannel quartz-crystal microbalance
2. Investigation of film‐thickness determination by oscillating quartz resonators with large mass load
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4. Characterization of a thickness‐shear mode quartz resonator with multiple nonpiezoelectric layers
5. High frequency thickness shear mode devices for organic vapor sensing
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