Investigation of film‐thickness determination by oscillating quartz resonators with large mass load
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1660931
Reference6 articles.
1. Verwendung von Schwingquarzen zur W�gung d�nner Schichten und zur Mikrow�gung
2. Resonances of One-Dimensional Composite Piezoelectric and Elastic Structures
3. Direct Gravimetric Calibration of a Quartz Crystal Microbalance
4. Long-Term Operation of Crystal Oscillators in Thin-Film Deposition
5. Acoustic Wave Analysis of the Operation of Quartz‐Crystal Film‐Thickness Monitors
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