Simultaneous nickel silicidation and silicon crystallization induced by excimer laser annealing on plastic substrate
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3377916
Reference17 articles.
1. Surface-scattering effects in polycrystalline silicon thin-film transistors
2. Flexible Electronics
3. Low-Temperature Annealing Combined with Laser Crystallization for Polycrystalline Silicon TFTs on Polymeric Substrate
4. Nickel-enhanced solid-phase epitaxial regrowth of amorphous silicon
5. Structure and electrical transport in microcrystalline composite Si-NiSi2 thin films
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