Design and development of a large range linear encoder with subnanometer resolution
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2358694
Reference15 articles.
1. Dimensional metrology for nanometre-scale science and engineering: towards sub-nanometre accurate encoders
2. Modeling and Control of a Six-Axis Precision Motion Control Stage
3. Compact diffractive interferometric displacement sensor in reflection
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