Design and development of an optical encoder with sub-micron accuracy using a multiple-tracks analyser grating
Author:
Affiliation:
1. State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4973726
Reference25 articles.
1. Design and development of a large range linear encoder with subnanometer resolution
2. Laser interferometric system for six-axis motion measurement
3. A New Capacitive Displacement Sensor With Nanometer Accuracy and Long Range
4. Measurement technologies for precision positioning
5. Two-degree-freedom displacement measurement based on a short period grating in symmetric Littrow configuration
Cited by 13 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. High Accuracy Image-Based Rotary Encoder With Polar Transformation of DIG;IEEE Sensors Journal;2023-11-15
2. A Novel Eddy Current Sensor for Displacement Measurement With High Accuracy and Long Range;IEEE Sensors Journal;2023-06-01
3. Consistent Manufacturing of Macro, Micro and Nano Cross-Scale Structures;Reports of China’s Basic Research;2023
4. An Optical Encoder Chip with Area Compensation;Electronics;2022-12-02
5. Distance and depth modulation of Talbot imaging via specified design of the grating structure;Optics Express;2022-03-14
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3