Arbitrary surface structuring of amorphous silicon films based on femtosecond-laser-induced crystallization
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2358922
Reference23 articles.
1. Semiconductor laser crystallization of a-Si:H on conducting tin-oxide-coated glass for solar cell and display applications
2. Phase transformation in amorphous silicon under excimer laser annealing studied by Raman spectroscopy and mobility measurements
3. Phase transformation mechanisms involved in excimer laser crystallization of amorphous silicon films
4. High performance low-temperature poly-Si n-channel TFTs for LCD
5. Femtosecond laser induced crystallization and permanent relief grating structures in amorphous inorganic (In2O3+1 wt % TiO2) films
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2. Single-shot selective femtosecond and picosecond infrared laser crystallization of an amorphous Ge/Si multilayer stack;Optics & Laser Technology;2023-06
3. Sub-40 nm nanogratings self-organized in PVP-based polymer composite film by photoexcitation and two sequent splitting under femtosecond laser irradiation;Applied Surface Science;2023-01
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5. Room temperature crystallization of amorphous silicon film by ultrashort femtosecond laser pulses;Optics & Laser Technology;2019-04
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