Single-mode waveguide-coupled light emitting diodes in unmodified silicon photonics fabrication processes

Abstract

We realize single-mode, waveguide-coupled, electrically driven silicon light emitting diodes in commercial, unmodified silicon photonics foundry processes and develop a model of both the electrical and optical behavior to understand the performance limitations. We measure a center wavelength of 1130 nm, a 90 nm 3 dB optical bandwidth, and 200 pW of optical power propagating in each direction. We show on-chip modulation and detection of the generated light using native resonant photodetectors integrated in the same chip. Our work unveils a new native light source available in silicon photonics processes, which can find applications ranging from device screening and fabrication quality assessment to imaging, refractive index sensing, or intra-chip communication.