Densification of functional plasma polymers by momentum transfer during film growth
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4767999
Reference17 articles.
1. Influence of ion energy and flux composition on the properties of plasma-deposited amorphous carbon and amorphous hydrogenated carbon films
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4. Macroscopic Approach to Plasma Polymerization Using the Concept of Energy Density
5. Functional plasma polymers deposited in capacitively and inductively coupled plasmas
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