1. State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433, China
2. Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China
3. State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, CAS, Shanghai 200050, China
4. Institute of Electronics, National Chiao Tung University, Hsinchu 30010, Taiwan
5. Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China