Sol-gel deposition and piezoelectric properties of {110}-oriented Pb(Zr0.52Ti0.48)O3 thin films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3293446
Reference21 articles.
1. What Thickness of the Piezoelectric Layer with High Breakdown Voltage is Required for the Microactuator?
2. Actuation Properties of Lead Zirconate Titanate Thick Films Structured on Si Membrane by the Aerosol Deposition Method
3. Characterization of Sol–Gel Multicoated Thick Pb(Zr0.52, Ti0.48)O3Films on Platinized Silicon Substrates for Microdevices Applications
4. Ferroelectric thin films for micro-sensors and actuators: a review
5. Thin Film Piezoelectrics for MEMS
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2. Development of an Air-Coupled Piezoelectric Micromachined Ultrasonic Transducer Using Sol-Gel PZT Thin Film for Fast-Prototyping;IEEE Open Journal of Ultrasonics, Ferroelectrics, and Frequency Control;2024
3. Piezoelectric properties of epitaxial Pb(Zr,Ti)O3 thin films grown on Si substrates by the sol–gel method;Thin Solid Films;2023-01
4. Piezoelectric Properties of {110}-Oriented A-Site Sr-Substituted Pb(Zr0.80Ti0.20)O3 Thin Films;Integrated Ferroelectrics;2022-10-06
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