Exposure of 38 nm period grating patterns with extreme ultraviolet interferometric lithography
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.125005
Reference9 articles.
1. Recent advances in the Sandia EUV 10x microstepper
2. Large-area achromatic interferometric lithography for 100 nm period gratings and grids
3. Multiple-exposure interferometric lithography
4. Vacuum ultraviolet holography
5. Operation of a normal‐incidence transmission grating monochromator at ALLADIN (invited)
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