In situ dc oxygen‐discharge cleaning system for optical elements
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1140869
Reference13 articles.
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2. CarbonK-edge fine structure in graphite foils and in thin-film contaminants on metal surfaces
3. Proton-Induced Contaminant Film Effects on Ultraviolet Reflecting Mirrors
4. Increase in Transmittance of Unbacked Aluminum Filters Exposed to rf or dc Discharges in Oxygen
5. Plasma discharge cleaning of replica gratings contaminated by synchrotron radiation
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