Tailoring small-scale plasticity of nanotwined-copper micropillars via microstructures

Author:

Yan Shaohua12ORCID,Zhong Zheng2ORCID,Qin Qing. H.3ORCID

Affiliation:

1. College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China

2. School of Science, Harbin Institute of Technology, Shenzhen 518055, People's Republic of China

3. Department of Engineering, Shenzhen MSU-BIT University, Shenzhen 518172, China

Abstract

Nanotwined (nt) copper is attractive in applications such as microbumps in the microelectronics industry because nt-copper presents sound mechanical and physical properties. To date, most studies of the mechanical properties of nt-copper have been performed at macroscales. However, different stories are told at micro/nanoscales, e.g., smaller size leads to higher strength. Understanding the mechanical properties of nt-copper at micro/nanoscales is crucial for improving the reliability and endurability of microdevices. In this paper, we fabricated nt-copper film with tailored microstructures, i.e., twin boundaries (TBs) with different spacings and orientations (parallel or slanted to loading direction). Then, we applied micro-compression testing, atomistic simulation, and theoretical analysis to investigate the influence of vertical twin-boundary spacing λ and orientation on the deformation behavior of nt-micropillars. Results show that the yield stress is increased with decreasing vertical λ. Micropillars with slanted λ = 15.5 nm TBs present the greatest strength, which may be attributed to a finer λ. The phenomenon, strength increasing with decreasing λ, was well explained by the Hall–Petch and confined layer slip models. Large-scale molecular dynamics simulations were used to uncover the atomistic and real-time deformation mechanisms. This microscale research on nt-micropillars may provide insights on designing advanced microelectronics.

Funder

China Postdoctoral Science Foundation

Basic and Applied Basic Research Foundation of Guangdong Province

Starting-up funding from Shenzhen University

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3