Ferroelectric properties of Pt∕PbTiO3∕PbZr0.3Ti0.7O3∕PbTiO3∕Pt integrated capacitors etched in noncrystalline phase
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2369628
Reference19 articles.
1. Dynamics of ferroelastic domains in ferroelectric thin films
2. Sidewalls contribution in integrated three-dimensional Sr0.8Bi2.2Ta2O9-based ferroelectric capacitors
3. Recovery of plasma-induced damage in PZT thin film with O2 gas annealing
4. Ferroelectric properties of wet-chemical patterned PbZr[sub 0.52]Ti[sub 0.48]O[sub 3] films
5. Integration technology for ferroelectric memory devices
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1. Properties of Individually Addressable Ferroelectric Nanocapacitor Arrays Fabricated by Focused Ion Beam Milling;Journal of Nanoscience and Nanotechnology;2013-08-01
2. Effect of top electrode thickness on the piezoresponse of polycrystalline ferroelectric capacitors;Journal of Physics D: Applied Physics;2012-11-19
3. Leakage Current and Dielectric Properties of Integrated Ferroelectric Capacitor Etched in Non-Crystalline Phase;Integrated Ferroelectrics;2012-01
4. Leakage Current of Pt/PbTiO3/PbZr0.3Ti0.7O3/PbTiO3/Pt Integrated Capacitors Etched in Non-Crystalline Phase;Ferroelectrics Letters Section;2012-01
5. Nanoscale and Spatial Variations Investigation of Etch Damage in Integrated Ferroelectric Capacitor Side Wall by Piezoresponse Force Microscopy;Japanese Journal of Applied Physics;2009-01-20
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