Ferroelectric properties of wet-chemical patterned PbZr[sub 0.52]Ti[sub 0.48]O[sub 3] films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Reference12 articles.
1. Fatigue-free ferroelectric capacitors with platinum electrodes
2. Smart Electroceramics
3. Micromachined piezoelectric force sensors based on PZT thin films
4. Dry Etching of Sol-Gel Pzt
5. Reactive Ion Etching of Lead Zirconate Titanate (PZT) Thin Film Capacitors
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