Hybrid fabrication of piezoelectric thick films using a sol-infiltration and photosensitive direct-patterning technique-Reference-Cited by-同舟云学术

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Hybrid fabrication of piezoelectric thick films using a sol-infiltration and photosensitive direct-patterning technique

Published:2015-03-18 Issue:11 Volume:50 Page:3845-3853
ISSN:0022-2461
Container-title:Journal of Materials Science
language:en
Short-container-title:J Mater Sci

Author:

Lee Jin-Hyung,Lee Jeong Hoon,Kim Sang Kyung,Park Hyung-Ho,Kim Tae Song

Funder

The KIST Institutional Program

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

http://link.springer.com/content/pdf/10.1007/s10853-015-8955-7.pdf

Reference27 articles.

1. Park JH, Kwon TY, Yoon DS, Kim H, Kim TS (2005) Fabrication of microcantilever sensors actuated by piezoelectric Pb(Zr0.52Ti0.48)O3 thick films and determination of their electromechanical characteristics. Adv Funct Mater 15:2021–2028

2. Kwon T, Eom K, Park J, Yoon DS, Lee HL, Kim TS (2008) Micromechanical observation of the kinetics of biomolecular interactions. Appl Phys Lett 93(17):173901. doi: 10.1063/1.3006329

3. Zawada T, Hansen K, Lou-Moeller R, Ringgaard E, Pedersen T, Thomsen EV (2010) High-performance piezoelectric thick film based energy harvesting micro-generators for MEMS. Procedia Eng 5:1164–1167. doi: 10.1016/j.proeng.2010.09.318

4. Wang Z, Zhu W, Zhu H, Miao J, Chao C, Zhao C, Tan OK (2005) Fabrication and characterization of piezoelectric micromachined ultrasonic transducers with thick composite PZT films. IEEE Trans Ultrason Ferroelectr Freq Control 52:2289–2297

5. Kwon TY, Eom K, Park JH, Yoon DS, Kim TS, Lee HL (2007) In situ real-time monitoring of biomolecular interactions based on resonating microcantilevers immersed in a viscous fluid. Appl Phys Lett 90(22):223903. doi: 10.1063/1.2741053

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Microstructural and electrical properties of nanostructured lead zirconate titanate composite thick films processed for MEMS applications via hybrid sol–gel approach;Journal of Alloys and Compounds;2020-07

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