Tailored probes for atomic force microscopy fabricated by two-photon polymerization

Author:

Göring Gerald1,Dietrich Philipp-Immanuel23,Blaicher Matthias23,Sharma Swati2,Korvink Jan G.2ORCID,Schimmel Thomas14,Koos Christian23,Hölscher Hendrik2

Affiliation:

1. Institute of Nanotechnology (INT), Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany

2. Institute for Microstructure Technology (IMT), Karlsruhe Institute of Technology (KIT), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany

3. Institute of Photonics and Quantum Electronics (IPQ), Karlsruhe Institute of Technology (KIT), Engesserstraße 5, 76131 Karlsruhe, Germany

4. Institute of Applied Physics (APH), Karlsruhe Institute of Technology (KIT), Wolfgang-Gaede-Straße 1, 76131 Karlsruhe, Germany

Funder

Karlsruhe Nano Micro Facility (KNMF)

European Research Council (ERC)

Deutsche Forschungsgemeinschaft (DFG)

Alfried Krupp von Bohlen und Halbach-Stiftung (Alfried Krupp von Bohlen und Halbach Foundation)

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

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